Cleanroom Core

Overview of Services

The Micro/Nanofabrication Cleanroom is a 3500 ft² class 1000 clean room that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research. This is a state-of-the-art nanotechnology facility that is part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, and is located in the Engineering & Science Research Building.

Technical Services:

• Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining System, Pattern Generator
• Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
• Characterization: Surface Profilometer, Spectroscopic Ellipsometer;
• Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
• Wet Etch: Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
• Thermal Processing: Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces

Leadership

Megan Tardif

Director of CORE
207-581-1225
megan.tardif@maine.edu

 

Henry Carfagno

Research Facilities Operational Manager

207-581-3381

henry.carfagno@maine.edu 

Location and hours of operation

Hours	Location
Monday - Friday   8 AM - 4:30 PM	Engineering & Science Research Building University of Maine  Orono, ME 04469

Links and Resources

1. Cleanroom Core Website

Contacts

Name	Role	Phone	Email	Location
Michael Call	Research Engineer	207-581-3382	michael.call@maine.edu	294 ESRB
Henry Carfagno	Research Facilities Operational Specialist	207-581-3381	henry.carfagno@maine.edu	149 Barrows Hall / ESRB

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