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Cleanroom Core

Overview of Services

The Micro/Nanofabrication Cleanroom is a 3500 ft2 class 1000 clean room that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research. This is a state-of-the-art nanotechnology facility that is part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, and is located in the Engineering & Science Research Building.

Technical Services:

• Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining System, Pattern Generator
• Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
• Characterization: Surface Profilometer, Spectroscopic Ellipsometer;
• Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
• Wet Etch: Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
• Thermal Processing: Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces


Megan Tardif

Director of CORE


Henry Carfagno

Research Facilities Operational Manager


Location and hours of operation

Hours Location

Monday - Friday  
8 AM - 4:30 PM  


Engineering & Science Research Building
University of Maine
 Orono, ME 04469

Links and Resources

  1. Cleanroom Core Website


Name Role Phone Email Location
Michael Call
Research Engineer
294 ESRB
Henry Carfagno
Research Facilities Operational Specialist
149 Barrows Hall / ESRB