Cleanroom Core



Overview of Services

The Micro/Nanofabrication Cleanroom is a 3500 ft2 class 1000 clean room that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research. This is a state-of-the-art nanotechnology facility that is part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, and is located in the Engineering & Science Research Building.

Technical Services:

• Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining System, Pattern Generator
• Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
• Characterization: Surface Profilometer, Spectroscopic Ellipsometer;
• Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
• Wet Etch: Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
• Thermal Processing: Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces

Leadership

Luke Doucette
General Manager of CORE
207-581-2251
luke.doucette@maine.edu


Megan Tardif
Financial Manager of CORE
207-581-1225
megan.tardif@maine.edu

Location and hours of operation

Hours Location

Monday - Friday  
8 AM - 4:30 PM  

 

Engineering & Science Research Building
University of Maine
 Orono, ME 04469

Links and Resources

  1. Cleanroom Core Website

Contacts

Name Role Phone Email Location
Michael Call
Research Engineer
 
207-581-3382
 
michael.call@maine.edu
 
294 ESRB
 
George Bernhardt
Research Scientist
 
207-581-3381
 
georgeb@maine.edu
 
149 ESRB
 

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