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The Micro/Nanofabrication Cleanroom is a 3500 ft2 class 1000 clean room that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research. This is a state-of-the-art nanotechnology facility that is part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, and is located in the Engineering & Science Research Building.
Technical Services:
• Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining System, Pattern Generator
• Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
• Characterization: Surface Profilometer, Spectroscopic Ellipsometer;
• Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
• Wet Etch: Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
• Thermal Processing: Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces
Christopher Boynton
Interim Director of CORE
207-581-1472
christopher.boynton@maine.edu
Megan Tardif
SR Financial Manager of CORE
207-581-1225
megan.tardif@maine.edu
| Hours | Location |
|
Monday - Friday
|
Engineering & Science Research Building |
| Name | Role | Phone | Location | |
|---|---|---|---|---|
| Michael Call |
Research Engineer
|
207-581-3382
|
michael.call@maine.edu
|
294 ESRB
|
| George Bernhardt |
Research Scientist
|
207-581-3381
|
georgeb@maine.edu
|
149 ESRB
|
