ALERT

ATTENTION ⚠️

On Saturday July 20th, 2024 at 4:30AM (UTC), maintenance has been scheduled for iLab Primary U.S.. Maintenance is planned for 4 hours and during this time, there is a server downtime of 2 hours. Details and updates can be found on the Agilent Status Page

For additional information, please contact the Agilent iLab Support by clicking on 'Help' at the top of your account page or by emailing ilab-support@agilent.com.

Cleanroom Core



Overview of Services

The Micro/Nanofabrication Cleanroom is a 3500 ft2 class 1000 clean room that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research. This is a state-of-the-art nanotechnology facility that is part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, and is located in the Engineering & Science Research Building.

Technical Services:

• Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining System, Pattern Generator
• Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
• Characterization: Surface Profilometer, Spectroscopic Ellipsometer;
• Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
• Wet Etch: Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
• Thermal Processing: Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces

Leadership


Megan Tardif

Director of CORE
207-581-1225
megan.tardif@maine.edu

 

Henry Carfagno

Research Facilities Operational Manager

207-581-3381

henry.carfagno@maine.edu 

Location and hours of operation

Hours Location

Monday - Friday  
8 AM - 4:30 PM  

 

Engineering & Science Research Building
University of Maine
 Orono, ME 04469

Links and Resources

  1. Cleanroom Core Website

Contacts

Name Role Phone Email Location
Michael Call
Research Engineer
 
207-581-3382
 
michael.call@maine.edu
 
294 ESRB
 
Henry Carfagno
Research Facilities Operational Specialist
 
207-581-3381
 
henry.carfagno@maine.edu
 
149 Barrows Hall / ESRB
 

Map