ALERT

ATTENTION ⚠️

In observance of the holidays, Agilent CrossLab/iLab Operations Software Support Help Desk will be closed during U.S. hours on Monday, January 20th, 2025. We will resume regular U.S. support hours on Tuesday, January 21st, 2025. For urgent matters, please add "Urgent" to the ticket/email subject or press "1" when prompted to escalate a call on the iLab Support phone, and we will prioritize those requests first.

Cleanroom Core

Overview of Services

The Micro/Nanofabrication Cleanroom is a 3500 ft² class 1000 clean room that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research. This is a state-of-the-art nanotechnology facility that is part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, and is located in the Engineering & Science Research Building.

Technical Services:

• Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining System, Pattern Generator
• Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
• Characterization: Surface Profilometer, Spectroscopic Ellipsometer;
• Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
• Wet Etch: Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
• Thermal Processing: Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces

Leadership

Megan Tardif

Director of CORE
207-581-1225
megan.tardif@maine.edu

Henry Carfagno

Research Facilities Operational Manager

207-581-3381

henry.carfagno@maine.edu

Location and hours of operation

Hours

Location

Monday - Friday
8 AM - 4:30 PM

Engineering & Science Research Building
University of Maine
Orono, ME 04469

Links and Resources

Cleanroom Core Website

Contacts